Holographic lithography for 2-D nanostructures (HOLO2D)


Project no.: 09.3.3.-LMT-K-712-15-0074

Project description:

The project aims at introduction of the student to high performance holographic lithography technology and equipment and to produce a set of variable periodic two-dimensional nanostructures for plasmonic biosensors. During the internship, the student will become familiar with HL equipment, software for modeling of expected two-dimensional structures, and will independently conduct experiments to produce two-dimensional plasmonic structures for masks. The student will perform modeling, exposure, developing and quantitative characterization of the masks using scanning electron microscopy and diffraction efficiency measurements. These masks will be used in further experiments in the formation of two-dimensional nanometric structures in silicon and fused quartz with silver nanoparticles produced by capillary assisted assembly and two-dimensional nanometric structures by combining silver evaporation with electron beam and lift-off lithography.

Project funding:

Project is funded by EU Structural Funds according to the 2014–2020 Operational Programme for the European Union Funds’ Investments priority “Development of scientific competence of researchers, other researchers, students through practical scientific activities” under Measure No. 09.3.3-LMT-K-712.

Period of project implementation: 2019-07-01 - 2019-08-31

Project coordinator: Kaunas University of Technology

Sigitas Tamulevičius

2019 - 2019

Institute of Materials Science